JPH0120680Y2 - - Google Patents
Info
- Publication number
- JPH0120680Y2 JPH0120680Y2 JP6111179U JP6111179U JPH0120680Y2 JP H0120680 Y2 JPH0120680 Y2 JP H0120680Y2 JP 6111179 U JP6111179 U JP 6111179U JP 6111179 U JP6111179 U JP 6111179U JP H0120680 Y2 JPH0120680 Y2 JP H0120680Y2
- Authority
- JP
- Japan
- Prior art keywords
- analysis
- sample
- ray
- diameter
- collimator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004458 analytical method Methods 0.000 claims description 22
- 239000004065 semiconductor Substances 0.000 claims description 19
- 238000010894 electron beam technology Methods 0.000 claims description 12
- 238000002441 X-ray diffraction Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 230000005855 radiation Effects 0.000 claims 1
- 238000004611 spectroscopical analysis Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
- 239000002470 thermal conductor Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6111179U JPH0120680Y2 (en]) | 1979-05-08 | 1979-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6111179U JPH0120680Y2 (en]) | 1979-05-08 | 1979-05-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55162146U JPS55162146U (en]) | 1980-11-20 |
| JPH0120680Y2 true JPH0120680Y2 (en]) | 1989-06-21 |
Family
ID=29295076
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6111179U Expired JPH0120680Y2 (en]) | 1979-05-08 | 1979-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0120680Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58171652A (ja) * | 1982-04-01 | 1983-10-08 | Denki Kagaku Keiki Co Ltd | β線透過式粉塵濃度測定装置 |
| JP3918104B2 (ja) * | 1997-10-02 | 2007-05-23 | 日本政策投資銀行 | 蛍光ｘ線分析装置および蛍光ｘ線検出器 |
-
1979
- 1979-05-08 JP JP6111179U patent/JPH0120680Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55162146U (en]) | 1980-11-20 |
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